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Title: MEMS and NEMS: Systems, Devices, and Structures
Description: By Sergey Edward Lyshevski; CRC Press, 2002, ISBN 0849312620. Multidisciplinary, forms basis for MEMS, NEMS synthesis, modeling, analysis, simulation, control, prototyping, fabrication. [CRC Press]
Directory: Science/Technology/Nanotechnology/Books
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