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URL:     http://diva.EECS.Berkeley.EDU:80/~lieber/Textbook2.html

Title:     Principles of Plasma Discharges and Materials Processing

Description:     M. Lieberman and A. Lichtemberg. This book discusses the fundamental principles of partially ionized, chemically reactive plasma discharges and their use in thin-film processing among other applications.

Directory:     Science/Physics/Plasma/Books

 
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